Origin and prevention of high contact resistance in multilevel metal-polyimide structures
- 1 May 1982
- journal article
- Published by Springer Nature in Journal of Electronic Materials
- Vol. 11 (3) , 441-452
- https://doi.org/10.1007/bf02654682
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Some aspects of shake-up phenomena in some simple polymer systemsJournal of Electron Spectroscopy and Related Phenomena, 1976
- Ion etching for pattern delineationJournal of Vacuum Science and Technology, 1976