Nanolithography and Nanochemistry: Probe‐Related Patterning Techniques and Chemical Modification for Nanometer‐Sized Devices
Top Cited Papers
- 28 April 2004
- journal article
- review article
- Published by Wiley in Angewandte Chemie International Edition in English
- Vol. 43 (19) , 2480-2495
- https://doi.org/10.1002/anie.200300609
Abstract
The size regime for devices produced by photolithographic techniques is limited. Therefore, other patterning techniques have been intensively studied to create smaller structures. Scanning‐probe‐based patterning techniques, such as dip‐pen lithography, local force‐induced patterning, and local‐probe oxidation‐based techniques are highly promising because of their relative ease and widespread availability. The latter of these is especially interesting because of the possibility of producing nanopatterns for a broad range of chemical and physical modification and functionalization processes; both the production of nanometer‐sized electronic devices and the formation of devices involving (bio)molecular recognition and sensor applications is possible. This Review highlights the development of various scanning probe systems and the possibilities of local oxidation methods, as well as giving an overview of state‐of‐the‐art nanometer‐sized devices, and a view of future development.Keywords
This publication has 121 references indexed in Scilit:
- Constructive Nanolithography and Nanochemistry: Local Probe Oxidation and Chemical ModificationLangmuir, 2003
- Direct printing of polymer microstructures on flat and spherical surfaces using a letterpress techniqueJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2002
- Thiol Diffusion and the Role of Humidity in “Dip Pen Nanolithography”Physical Review Letters, 2002
- Maskless electron beam lithography: prospects, progress, and challengesMicroelectronic Engineering, 2002
- Integrated atomic force microscopy array probe with metal–oxide–semiconductor field effect transistor stress sensor, thermal bimorph actuator, and on-chip complementary metal–oxide–semiconductor electronicsJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2000
- “Constructive Nanolithography”: Inert Monolayers as Patternable Templates for In-Situ Nanofabrication of Metal-Semiconductor-Organic Surface Structures—A Generic ApproachAdvanced Materials, 2000
- Investigation of Morphologies of One- and Two-Phase Blends of Isotactic Poly(propene) with Random Poly(ethene-co-1-butene)Macromolecules, 1998
- Selbstorganisation in natürlichen und in nichtnatürlichen SystemenAngewandte Chemie, 1996
- Atomic force microscope lithography using amorphous silicon as a resist and advances in parallel operationJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1995
- The scanning tunneling microscope as a tool for nanofabricationNanotechnology, 1990