Precision Electron Beam Microfabrication
- 1 November 1973
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science and Technology
- Vol. 10 (6) , 1008-1011
- https://doi.org/10.1116/1.1318454
Abstract
A computer-controlled electron beam microfabrication system has been used to fabricate complex, high-frequency acoustic surface wave devices. System hardware and software, fabrication process, and results are described.Keywords
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