Reactive Ion Etching of MBE GaAs: A Raman Scattering Study

• 9 August 1988
• proceedings article
• Published by SPIE-Intl Soc Optical Eng
• https://doi.org/10.1117/12.947423

Abstract

Keywords

• PHONONS
• PLASMONS
• REACTIVE ION ETCHING
• MOLECULAR BEAM EPITAXY
• GALLIUM ARSENIDE
• RAMAN SCATTERING