Low distortion, large area ion beam proximity printing for GaAs field effect transistors and monolithic microwave integrated circuits
- 1 November 1990
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B
- Vol. 8 (6) , 1941-1944
- https://doi.org/10.1116/1.584879
Abstract
No abstract availableKeywords
This publication has 0 references indexed in Scilit: