Sputter deposition of yttria-stabilized zirconia onto a porous Au substrate

• 1 May 1995
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 13  (3) , 658-661
• https://doi.org/10.1116/1.579802

Abstract

Keywords

• MICROSTRUCTURES
• MATERIALS SCIENCE
• YTTRIA STABILIZED ZIRCONIA
• ELECTRON MICROSCOPY
• THIN FILM