Intrinsic stress in vacuum-deposited titanium on single-crystal silicon wafers
- 1 October 1974
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 23 (3) , S67-S69
- https://doi.org/10.1016/0040-6090(74)90025-x
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Stress in Co-Ni-Fe and Ni-Fe FilmsJournal of Applied Physics, 1968
- Deformation of and Stress in Epitaxial Silicon Films on Single-Crystal SapphireJournal of Applied Physics, 1965
- Determination of Stress in Films on Single Crystalline Silicon SubstratesReview of Scientific Instruments, 1965
- Stress Anisotropy in Evaporated Iron FilmsJournal of Applied Physics, 1959
- Measurement of the Elastic Constants of Silicon Single Crystals and Their Thermal CoefficientsPhysical Review B, 1951