Undetectability of the point defect as an interface state in thermal
- 1 January 1998
- journal article
- letter
- Published by IOP Publishing in Journal of Physics: Condensed Matter
- Vol. 10 (1) , L19-L25
- https://doi.org/10.1088/0953-8984/10/1/003
Abstract
The electrical activity of the electron-spin-resonance-active interfacial point defects and (unpaired Si bonds) has been examined on standard thermal . After elimination of the H-passivation factor, this has been achieved through combination of electrical and ESR analysis on common suites of samples exhibiting a distinct controlled variation, both relatively and absolutely, of the and densities. Unlike initial inference, it is found that is electrically inactive as a degrading interface state; hence it has no direct electrical influence in -based device physics. All defects, however, are found to be electrically active, putting these EPR-active defects in a unique position.Keywords
This publication has 29 references indexed in Scilit:
- The silicon-silicon dioxide system: Its microstructure and imperfectionsReports on Progress in Physics, 1994
- Structural relaxation of defects at the (111)Si/ interface as a function of oxidation temperature: The -generation–stress relationshipPhysical Review B, 1993
- Relationship between stress and dangling bond generation at the (111)Si/interfacePhysical Review Letters, 1993
- Dissociation kinetics of hydrogen-passivated (111) Si-interface defectsPhysical Review B, 1990
- MOS interface states: overview and physicochemical perspectiveSemiconductor Science and Technology, 1989
- Kinetics of passivation of centers at the (111) Si- interfacePhysical Review B, 1988
- 2 9Si hyperfine structure of unpaired spins at the Si/SiO2 interfaceApplied Physics Letters, 1983
- Characterization of Si/SiO2 interface defects by electron spin resonanceProgress in Surface Science, 1983
- Interface states and electron spin resonance centers in thermally oxidized (111) and (100) silicon wafersJournal of Applied Physics, 1981
- ESR centers, interface states, and oxide fixed charge in thermally oxidized silicon wafersJournal of Applied Physics, 1979