Monolithically Integrable High Speed Photodetectors
- 23 February 1987
- proceedings article
- Published by SPIE-Intl Soc Optical Eng
- Vol. 716, 104-108
- https://doi.org/10.1117/12.937457
Abstract
Monolithically integrable lateral PIN detectors have been developed. The device fabrication procedure has been optimized to be compatible with standard integrated circuit fabrication procedures.© (1987) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.Keywords
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