Assessing thermal Cl2 etching and regrowth as methods for surface passivation

• 1 November 1990
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B
• Vol. 8  (6) , 1960-1965
• https://doi.org/10.1116/1.584883

Abstract

Keywords

• SURFACE PASSIVATION
• REGROWTH
• CL2 ETCHING
• ASSESSING THERMAL CL2