Development of a new Ionization Gauge with Bessel-Box Type Energy Analyzer.

• 1 January 1994
• journal article
• Published by The Vacuum Society of Japan in SHINKU
• Vol. 37  (3) , 267-269
• https://doi.org/10.3131/jvsj.37.267

Abstract

Keywords

• ENERGY ANALYZER
• DEVELOPMENT OF A NEW
• BOX TYPE
• NEW IONIZATION
• IONIZATION GAUGE
• BESSEL BOX
• TYPE ENERGY