Angular distribution of particles sputtered from metals and alloys

• 1 July 1988
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 6  (4) , 2316-2318
• https://doi.org/10.1116/1.575582

Abstract

Keywords

• CHARGED PARTICLES
• COPPER
• ZINC
• ALKALINE EARTH METAL