A comprehensive analysis of surface acoustic wave reflections

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Abstract
A thorough study of the perturbative and variational approaches is carried out for the surface acoustic wave reflection problem. We have shown that the perturbation treatment by Datta and Hunsinger and potentially powerful variational formulation by Chen and Haus [IEEE Trans. Sonics Ultrason. SU-32, 395 (1985)] are mutually consistent. In their common region of validity, these two approaches yield nearly identical results for the reflection coefficients and velocity shifts due to metal finger and groove overlays. Term-by-term comparison of the mass- and stress-loading effects, and also the electric shorting effect, is carried out to provide a coherent picture of the reflection phenomena. The on- and off-resonance behavior of the reflection coefficient can be described correctly using either one of these theories, with proper inclusion of the overlay shape dependence. A new term for electric shorting is derived for groove overlays.