Defect and bulk electrical conduction in SIMOX buried oxides
- 9 December 2002
- proceedings article
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- p. 174-175
- https://doi.org/10.1109/soi.1991.162913
Abstract
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This publication has 1 reference indexed in Scilit:
- Charge transport and trapping phenomena in off-stoichiometric silicon dioxide filmsJournal of Applied Physics, 1983