Theoretical and experimental study of high fluence germanium implantation into silicon. Contribution of atomic mixing

This publication has 25 references indexed in Scilit:

• The injection of inert gas ions into solids: Their trapping and escape
  Radiation Effects, 1980
• The depth resolution of sputter profiling
  Applied Physics A, 1979
• Diffusion approximations to cascade mixing
  Radiation Effects, 1979
• Model calculation of ion collection in the presence of sputtering
  Radiation Effects, 1976
• The spatial distribution of ions implanted into solids subject to diffusion, local trapping and surface sputtering
  Radiation Effects, 1976
• The spatial distribution of ions implanted into solids subject to diffusion and surface sputtering
  Radiation Effects, 1975
• Depth distributions of implanted atoms under the influence of surface erosion and diffusion
  Radiation Effects, 1973
• DEDUCTION OF ION RANGES IN SOLIDS FROM COLLECTION EXPERIMENTS
  Applied Physics Letters, 1962
• Sputtering experiments in the high energy region
  Nuclear Instruments and Methods, 1961
• Collection and sputtering experiments with noble gas ions
  Nuclear Instruments and Methods, 1961