A theoretical and experimental analysis of the ellipsometer
- 31 August 1969
- journal article
- Published by Elsevier in Surface Science
- Vol. 16, 34-66
- https://doi.org/10.1016/0039-6028(69)90004-1
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Ellipsometry Using a Retardation Plate as Compensator*Journal of the Optical Society of America, 1967
- Formulas for Using Wave Plates in Ellipsometry*Journal of the Optical Society of America, 1967
- Ellipsometry with Non-Ideal CompensatorsJournal of the Optical Society of America, 1967
- Exact Theory of Retardation Plates*Journal of the Optical Society of America, 1964
- Measurement of the thickness and refractive index of very thin films and the optical properties of surfaces by ellipsometryJournal of Research of the National Bureau of Standards Section A: Physics and Chemistry, 1963
- Determination of the Properties of Films on Silicon by the Method of EllipsometryJournal of the Optical Society of America, 1962