Studies of Phosphorus Pile‐Up at the Si ‐ SiO2 Interface Using Auger Sputter Profiling
- 1 May 1981
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 128 (5) , 1101-1106
- https://doi.org/10.1149/1.2127559