A hydrogen field ion source with focusing optics

• 1 January 1986
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B
• Vol. 4  (1) , 116-119
• https://doi.org/10.1116/1.583360

Abstract

Keywords

• CHARGED PARTICLES
• ION BEAM
• INTEGRATED CIRCUIT
• FIELD EMISSION
• QUANTUM MECHANICS