Effects of ultrathin oxides in conducting MIS structures on GaAs

• 1 July 1978
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science and Technology
• Vol. 15  (4) , 1397-1401
• https://doi.org/10.1116/1.569795

Abstract

Keywords

• OXIDATION
• GALLIUM ARSENIDE
• PALLADIUM
• THIN FILMS
• SCHOTTKY DIODES
• SCHOTTKY BARRIER
• THIN FILM
• ALUMINUM
• CHEMICAL REACTION
• SCHOTTKY DIODE