Mechanism of plasma polymerization ofN-silyl-substituted cyclodisilazane: Structure and properties of polymer film
- 1 December 1987
- journal article
- research article
- Published by Springer Nature in Plasma Chemistry and Plasma Processing
- Vol. 7 (4) , 429-450
- https://doi.org/10.1007/bf01030488
Abstract
No abstract availableKeywords
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