Microcleavage transmission electron microscopy applied to the interfacial structure of multilayers and microstructure of small particles on a substrate
- 25 May 1987
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 50 (21) , 1480-1481
- https://doi.org/10.1063/1.97806
Abstract
We have developed a new technique useful in imaging microstructures such as small particles, multilayers, and superlattices on a substrate. By producing images at various angles with respect to the substrate we have been able to obtain new information on interfacial structure not yet available with other techniques.Keywords
This publication has 1 reference indexed in Scilit:
- Novel Characterization Of Thin Film Multilayered Structures: Microcleavage Transmission Electron MicroscopyPublished by SPIE-Intl Soc Optical Eng ,1985