The impact of microfabrication technology on x-ray optics
- 1 January 1981
- proceedings article
- Published by AIP Publishing in AIP Conference Proceedings
- Vol. 75 (1) , 210-222
- https://doi.org/10.1063/1.33154
Abstract
X‐ray optics stands on the threshold of realizing its early promise: precision analysis of microstructure on the scale of the x‐ray wavelength. The achievement of this exciting goal will depend in large part on advances in microfabrication technology making possible the precision fabrication of periodic microstructures. A review of recent advances in, as well as future prospects for: x‐ray microscopy, coded imaging, and space‐time resolved spectroscopy, resulting from improved microstructure fabrication capabilities is presented.Keywords
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