Comment on the paper “failure of aluminium contacts to silicon in shallow diffused transistors”
- 1 November 1970
- journal article
- Published by Elsevier in Microelectronics Reliability
- Vol. 9 (6) , 515-516
- https://doi.org/10.1016/0026-2714(70)90239-8
Abstract
No abstract availableThis publication has 2 references indexed in Scilit:
- Failure of aluminium contacts to silicon in shallow diffused transistorsMicroelectronics Reliability, 1970
- The Effect of Moisture on the Aluminum-Silica ReactionJournal of the Electrochemical Society, 1968