Ir–Zr alloys as diffusion barriers between Cu and Si(100)

• 1 July 1993
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 11  (4) , 1454-1457
• https://doi.org/10.1116/1.578683

Abstract

Keywords

• ENERGY
• POLYCRYSTALLINE
• DIFFUSION
• COPPER
• TEMPERATURE
• SILICON
• MEASUREMENT
• ZIRCONIUM ALLOYS
• FILMS
• ACTIVATION ENERGY
• GRAIN BOUNDARIES