Chemical vapour deposition of transition-metal silicides by pyrolysis of silyl transition-metal carbonyl compounds
- 1 January 1977
- journal article
- research article
- Published by Royal Society of Chemistry (RSC) in J. Chem. Soc., Dalton Trans.
- No. 20,p. 2058-2061
- https://doi.org/10.1039/dt9770002058
Abstract
Pyrolysis of [Co(CO)4(SiH3)], [Fe(CO)4(SiH3)2], and [Mn(CO)5(SiH3)] at 773 K in a flow system affords the transition-metal silicldes CoSi, β-FeSi2 and MnSi–Mn5Si3 respectively. Static pyrolysis of [Mn(CO)5(SiH3)] gives only amorphous solid products which contain, in addition to metal and silicon, appreciable quantities of carbon, hydrogen, and oxygen.Keywords
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