Comparison of the measurement of beam-current densities in an electron microscope using a Faraday cup and solid-state detector
- 1 April 1976
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 47 (4) , 1694-1696
- https://doi.org/10.1063/1.322795
Abstract
A Faraday cup has been constructed which is capable of accurately measuring beam-current densities in the image plane of an electron microscope. This device has been employed to calibrate a solid-state detector typical of those often used to measure such small electron intensities. The ability of the solid-state detector to distinguish single electrons was found to be a sensitive function of the incident electron intensity. Important applications of this work include investigations of radiation damage in beam-sensitive materials, e.g., biological specimens.This publication has 1 reference indexed in Scilit:
- The calibration of beam measurement devices in various electron microscopes, using an efficient Faraday cupJournal of Physics E: Scientific Instruments, 1971