A Silicon Field Emitter Array Planar Vacuum FET Fabricated with Microfabrication Techniques

Publisher Website

1 January 1986

journal article
Published by Springer Nature in MRS Proceedings

Vol. 76
https://doi.org/10.1557/proc-76-25

Abstract

No abstract available

Keywords

This publication has 2 references indexed in Scilit:

Field emission cathode array development for high-current-density applications
Applications of Surface Science, 1983
Physics of Semiconductor Devices
Physics Today, 1970