Cathodoluminescence Study on Diffusion Coefficients of Al, Ga and In in ZnSe

Abstract
The temperature dependence on the diffusion coefficients of Al, Ga and In in ZnSe was studied. The cleavage cross-sectional surface of a diffused ZnSe wafer was observed by the cathodoluminescence mode of SEM. The following relations were obtained: D Al=1.18×10-1 exp (-1.92 eV/k T), D Ga=6.76×10-2 exp (-1.80 eV/k T) and D In=4.45×10-1 exp (-1.84 eV/k T).