Depth profile analysis of thin film solar cells using SNMS and SIMS

• 21 May 1997
• journal article
• research article
• Published by Springer Nature in Analytical and Bioanalytical Chemistry
• Vol. 358  (1) , 207-210
• https://doi.org/10.1007/s002160050385

Abstract

Keywords

• SNO2
• DEPTH PROFILE
• AMORPHOUS SILICON
• PLASMA PRESSURE
• TRANSPARENT CONDUCTING OXIDE