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Characterization of Microporous Silicon Fabricated by Immersion Scanning
Home
Publications
Characterization of Microporous Silicon Fabricated by Immersion Scanning
Characterization of Microporous Silicon Fabricated by Immersion Scanning
EB
E. Bassous
E. Bassous
MF
M. Freeman
M. Freeman
JH
J.-M. Halbout
J.-M. Halbout
SL
S. S. Lyer
S. S. Lyer
VK
V. P. Kesan
V. P. Kesan
PM
P. Munguia
P. Munguia
SP
S. F. Pesarcik
S. F. Pesarcik
BW
B. L. Williams
B. L. Williams
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1 January 1991
journal article
Published by
Springer Nature
in
MRS Proceedings
Vol. 256
https://doi.org/10.1557/proc-256-23
Abstract
No abstract available
Keywords
MICROPOROUS
ADAPTABILITY
FABRICATED
SUBSTRATES
DESORPTION
SILICON
VISIBLE
NITROGEN
REVERSIBLE
Cited
Cited by 23 articles
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