Wet etching of silicon gratings with triangular profiles
- 29 September 2005
- journal article
- Published by Springer Nature in Microsystem Technologies
- Vol. 11 (12) , 1287-1291
- https://doi.org/10.1007/s00542-005-0612-7
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Anisotropic etching for optical gratingsSensors and Actuators A: Physical, 1995
- Recent Developments in the use of the Tripod Polisher for TEM Specimen PreparationMRS Proceedings, 1991