Chemical vapor deposition in fluidized bed reactors

• 16 November 1992
• journal article
• Published by Elsevier in Surface and Coatings Technology
• Vol. 54-55, 219-223
• https://doi.org/10.1016/0257-8972(92)90165-7

Abstract

Keywords

• FLUIDIZED BED REACTORS
• CHEMICAL VAPOR DEPOSITION