Micromachined fabrication of Si cantilevers with Schottky diodes integrated in the tip

• 1 March 1998
• journal article
• research article
• Published by Springer Nature in Applied Physics A
• Vol. 66  (7) , S65-S69
• https://doi.org/10.1007/s003390051101

Abstract

Keywords

• PACS: 07.79
• 07.79.L
• 06.70
• 73.40.N