Chemical vapor deposition of aluminum from dimethylaluminumhydride (DMAH): Characteristics of DMAH vaporization and Al growth kinetics
- 1 November 1995
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 13 (6) , 2863-2871
- https://doi.org/10.1116/1.579605
Abstract
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