Two types of MeV ion beam enhanced adhesion for Au films in SiO2
- 1 April 1985
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 9 (1) , 20-24
- https://doi.org/10.1016/0168-583x(85)90771-2
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Non-registered silicon produced at a metal–silicon interface by 14 MeV oxygen ionsApplied Physics Letters, 1984
- Fast chemistry in ion wakesInternational Journal of Mass Spectrometry and Ion Physics, 1983
- Enhanced adhesion from high energy ion irradiationThin Solid Films, 1983
- Ion-beam-enhanced adhesion in the electronic stopping regionNuclear Instruments and Methods in Physics Research, 1982