Junction metrology by cross-sectional atomic force microscopy

• 1 January 1996
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 14  (1) , 452-456
• https://doi.org/10.1116/1.588493

Abstract

Keywords

• CROSS SECTION
• ATOMIC FORCE MICROSCOPY