A 3-axis surface micromachined ΣΔ accelerometer
- 22 November 2002
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- A micromachined fully differential lateral accelerometerPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- A 15 b electromechanical sigma-delta converter for acceleration measurementsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Embedded micromechanical devices for the monolithic integration of MEMS with CMOSPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- A monolithic surface micromachined accelerometer with digital outputIEEE Journal of Solid-State Circuits, 1995