Solid-phase epitaxial growth of polycrystalline silicon films amorphized by ion implantation
- 30 June 1984
- journal article
- Published by Elsevier in Materials Letters
- Vol. 2 (5) , 362-366
- https://doi.org/10.1016/0167-577x(84)90112-5
Abstract
No abstract availableKeywords
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