Statistically independent soft breakdowns redefine oxide reliability specifications

Publisher Website

25 June 2003

proceedings article
Published by Institute of Electrical and Electronics Engineers (IEEE)

https://doi.org/10.1109/iedm.2002.1175801

Abstract

No abstract available

Keywords

This publication has 1 reference indexed in Scilit:

Ultra-thin oxide reliability for ULSI applications
Semiconductor Science and Technology, 2000