Sputtering behaviour of stainless steel during Pt ion implantation
- 31 March 1993
- journal article
- Published by Elsevier in Materials Letters
- Vol. 16 (2) , 139-141
- https://doi.org/10.1016/0167-577x(93)90038-y
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- A broad-beam, high-current metal-ion implantation facilityNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1991
- Compound formation effects in computing implantation profilesMaterials Science and Engineering: A, 1989
- Limits of composition achievable by ion implantationJournal of Vacuum Science and Technology, 1978