Membranes for Micropumps from Macroporous Silicon
- 1 November 2000
- journal article
- research article
- Published by Wiley in Physica Status Solidi (a)
- Vol. 182 (1) , 585-590
- https://doi.org/10.1002/1521-396x(200011)182:1<585::aid-pssa585>3.0.co;2-4
Abstract
No abstract availableKeywords
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