Mechanical decoupling of monolithic pressure sensors in small plastic encapsulations
- 1 April 1990
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 23 (1-3) , 1065-1069
- https://doi.org/10.1016/0924-4247(90)87090-6
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Miniature pressure sensors and their temperature compensationSensors and Actuators, 1987