Ion beam analysis for depth profiling

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Abstract
New techniques in the application of ion beam analysis to depth profiling in solids are briefly surveyed. These include (1) non‐Rutherford backscattering analysis using high energy beams, (2) resonant nuclear reaction analysis, (3) time‐of‐flight elastic recoil detection spectrometry, and (4) heavy ion backscattering spectrometry. The last can be used for very precise depth profiling in one configuration, or as a very sensitive trace contaminant analysis in another configuration.

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