Oxygen Solubility in Liquid Silicon in Equilibrium with SiO and SiO2
- 1 February 1989
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 136 (2) , 551-554
- https://doi.org/10.1149/1.2096680
Abstract
The oxygen content of heat‐treated and quenched samples has been analyzed by the SIMS technique in order to investigate the temperature dependence of the equilibrium . A phase was predicted by thermodynamical calculations and also verified experimentally. This phase appears in equilibrium with a melt of lower oxygen content than the phase and, when formed, determines the oxygen content of the melt. The existence of the phase in a Czochralski silicon crystal growth system was confirmed and the implications are briefly discussed.Keywords
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