Anisotropy in resistivity of MoNx films at 4.2 K

• 1 September 1996
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 14  (5) , 3395-3399
• https://doi.org/10.1116/1.588542

Abstract