RBS depth profiling of light elements in non-homogenous binary films
- 1 November 1993
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 83 (3) , 366-372
- https://doi.org/10.1016/0168-583x(93)95858-3
Abstract
No abstract availableThis publication has 6 references indexed in Scilit:
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