Preparation of A1N Thin Films by Reactive R-F Sputtering and their Properties

• 1 January 1972
• journal article
• Published by The Vacuum Society of Japan in SHINKU
• Vol. 15  (6) , 214-221
• https://doi.org/10.3131/jvsj.15.214

Abstract

Keywords

• THIN FILMS
• A1N THIN
• PROPERTIES
• SPUTTERING
• PREPARATION OF A1N
• REACTIVE