Improvement in Soft Magnetic Properties of Heat-Treated Fe-C/Ni-Fe Multilayers

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Abstract
Ion beam-sputtered Fe-9 at%C/Ni-Fe multilayers are heat treated and the changes in their magnetic properties are examined. Relative permeability increases and coercivity decreases as the heat treatment temperature increases. The mean anisotropy field and magnitude dispersion also decrease with increasing temperature. The (110) plane distance decreases with the heat treatment, showing that compressive stress within the film is released. A film separated from the substrate has a decrease in the mean anisotropy field and magnitude dispersion. Thus, it can be concluded that heat treatment plays an important role in releasing stress.