Comparison of Atomic Force Microscopy and Nanoscale Optical Microscopy for Measuring Step Heights
- 1 March 1993
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 32 (3S)
- https://doi.org/10.1143/jjap.32.1478
Abstract
Comparison of measured step heights was carried out by means of nanoscale optical microscopes and an atomic force microscope (AFM) using a Frank spiral as a standard reference. It was found that the individual step height of the spiral was about 16.5 nm as obtained using two-beam interferometry, but AFM showed the height as 23.45-18.98 nm. This discrepancy was discussed briefly.Keywords
This publication has 0 references indexed in Scilit: