Sub-Nanometre Surface Texture and Profile Measurement with NANOSURF 2
- 1 January 1988
- journal article
- Published by Elsevier in CIRP Annals
- Vol. 37 (1) , 519-522
- https://doi.org/10.1016/s0007-8506(07)61691-6
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- The assessment of ultra-smooth substrates and overcoatingsVacuum, 1985
- Thermal expansion and length stability of Zerodur in dependence on temperature and timeApplied Optics, 1985
- Optical system for measuring the profiles of super-smooth surfacesPrecision Engineering, 1985